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Type of Defect: |
Disc Deformation |
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Description: |
Substrate surface deformed by Tooling parts (including Stamper) |
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Observation Method: |
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Recommendation Upon Observation: |
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Other Evaluation Method: |
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Cause |
Countermeasure |
| Insufficient ejection setting (too late, too early, not parallel release) |
Adjust air blow timing (too late in usual) |
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Insufficient ejection setting (too late, too early, not parallel release) |
Adjust intensity of air blow |
| Insufficient ejection setting (too late, too early, not parallel release) |
Check air blow nozzle dimension (balance) |
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Poor mold (also stamper) |
Change stamper |
| Poor mold (also stamper) |
Check mold design |
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Poor mold (also stamper) |
Repair center piece |
