Type of Defect:	Optical Defect (1/2)
Description:	Optical defect on substrate caused by tooling
Observation Method:	Visible under polarized light / as bright specks located at the same position on several consecutive disks
Recommendation Upon Observation:
Other Evaluation Method:
Cause	Countermeasure
Particle behind the stamper	Change stamper under suitable clean room conditions
Particle behind the stamper	Check and clean behind the stamper (including mold surface)

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Teijin Kasei America, Inc.
Tel: (770) 346-8949